Motorized High Vacuum Butterfly Valve used for Chip Production Industry

Electric Butterfly Valve Application

DCL electric motorized high vacuum butterfly valves are widely used on crystal growth furnaces, which are used for monocrystalline silicon wafer production. These valves can be zero leakage in very low pipe pressure, which is lower to 1.3*10^-4Pa. Forged stainless steel body and special sealing structure design, to ensure valve’s long life cycles. Electric actuators are CSA/UL certificated and CE marked.

Sizes: DN50 to DN400

Electric Butterfly Valve Features

Concentric electric butterfly valve

• Body type: wafer or lug
• Body material: Ductile iron, SS304(CF8), SS316(CF8M)
• Seat material: EPDM, PTFE, NBR(Buna-N) available
• sure PN: Designed for commercial and industrial applications up to 200 psi
• Stem design: Available in square shaft for easy mounting of actuators
• Top flange: ISO 5211 direct mounting of actuators
• One piece shaft: Maintains disc position.
• Shaft pins: Enables a vibration free connection between the shaft and the disc..
• O ring seal: Provides a seal to interior stem and bushings.

Electric Butterfly Valve Specification