PFA Inline Heater 6kW 400V Type-J for Siconnex Etch Hood - High Purity Semiconductor Heating
High-purity PFA inline heater designed for hydrofluoric acid (HF), potassium hydroxide (KOH), and other PFA-compatible chemistries. Engineered to push high-purity materials to operating extremes while maximizing performance and reliability in semiconductor processing applications.
- Unmatched heating of semiconductor process fluids up to 210°C
- Patented heater gas purge system ensures long element life and reduced cost of ownership
- Thick-walled chamber provides long service life in harsh high-temperature applications
- Element purge monitoring minimizes ionic contamination potential
- Cleanroom assembly and testing ensures highest manufacturing standards
- All fluoropolymer wetted parts provide outstanding compatibility with virtually any chemistry
- Low watt density design enables precise and stable control of process temperature
- PVDF high-temperature mounting brackets (high-temperature model)
| Parameter | Value |
|---|---|
| Voltage | 110-415V 1P/3P |
| Power | 6-18kW |
| Maximum Pressure | 0.4MPa |
| Minimum Pressure | 0.1MPa |
| Maximum Flow | 30L/min |
| Maximum Operating Temperature | 120°C |
- This product must be installed vertically
- The use process must be grounded
- Water must be passed before heating
- Product size and technical parameters can be customized according to customer needs
- Semiconductor Wet Processes
- Sterilization/Cleaning
- Solar/Photovoltaic Wafer Cleaning
For over ten years, our company has specialized in research, development, and production of PCB and FPC electroplating equipment, electric heaters, heat exchangers, and coating applications. We have collected advanced technologies and processes from domestic and international sources, combining them with extensive PCB industry experience to deliver products with world-leading quality, stability, and reliability. Our company has passed ISO9001:2008 quality management system certification and CQC:CE certification, implementing scientific management and international quality standards.
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