High-Temperature Resistant SiC Forks with 1650°C Max Service Temp and 3800MPa Flexural Strength for Semiconductor Manufacturing
Price:
200-500 yuan/kg
MOQ:
Negotiable
Delivery Time:
Negotiable
Brand:
KeGu
Product Description
High-Temperature Resistant SiC Forks
Precision Core Components for Semiconductor Manufacturing
High-Temperature Resistant Silicon Carbide (SiC) Forks, also known as Pressureless Sintered SiC Robotic Arms, represent a breakthrough in material science for precision automation. Engineered using advanced pressureless sintering technology, these forks deliver unparalleled performance in the most demanding semiconductor manufacturing environments.
Key Properties & Advantages
- Extreme Temperature Resilience: Withstands operating temperatures up to 1650°C in air, maintaining structural integrity in high-temperature processes.
- Superior Mechanical Strength: Features high flexural strength (320-400 MPa) from room temperature up to 1300°C, ensuring reliable performance under heavy loads.
- Exceptional Thermal Management: Offers outstanding thermal conductivity (196 W/m*K at 20°C) combined with low thermal expansion (4.0 x 10⁻⁶/K), providing excellent thermal shock resistance (>350°C).
- Maximized Durability: Ultra-high hardness (2350 kg/mm² Vickers) and near-zero open porosity ensure exceptional wear resistance and long-term reliability in abrasive environments.
- Optimized for Precision: High modulus of elasticity (410 GPa) and rigid lightweight design enable minimal deflection and high-precision handling of sensitive substrates like silicon wafers.
Technical Specifications
| Physical Properties | Unit | Value (SSiC) |
|---|---|---|
| Composition: SiC | Vol% | ≥98 |
| Density @ 20 °C | g/cm³ | ≥3.05 |
| Open Porosity | Vol% | ≈0 |
| Vickers Hardness HV1 | kg/mm² | 2350 |
| Rockwell Hardness 45N | R45N | 93 |
| Flexural Strength @ 20°C | MPa | 320-400 |
| Flexural Strength @ 1300°C | MPa | 300-400 |
| Thermal Conductivity @ 20°C | W*m⁻¹*K⁻¹ | 196 |
| Thermal Conductivity @ 1200°C | W*m⁻¹*K⁻¹ | 60 |
| Max. Service Temp (air) | °C | 1650 |
| Thermal Shock Resistance | °C | >350 |
| Coefficient of Thermal Expansion | 10⁻⁶/K | 4.0 |
| Modulus of Elasticity @ RT | GPa | 410 |
Critical Application Areas
- Semiconductor Manufacturing: Ideal for wafer handling, transfer, and processing in CVD, LPCVD, diffusion furnaces, and other high-temperature equipment
- Advanced Thermal Processing: Essential components for high-temperature industrial furnaces and heat treatment systems
- Aerospace & Defense: Critical parts requiring thermal stability and lightweight durability
- Nuclear Energy Systems: Components for demanding radiation and high-temperature environments
- Precision Automation: Robotic arms and end-effectors for cleanroom and harsh environment applications
Performance Benefits
- Reduced particle generation and contamination in cleanroom environments
- Minimal thermal deformation for precise positioning accuracy
- Extended service life compared to quartz and graphite alternatives
- Reduced maintenance downtime and increased production throughput
- Excellent resistance to chemical corrosion from process gases and cleaning agents
These SiC forks are specifically engineered to enhance process reliability and yield in precision manufacturing applications where temperature extremes, chemical resistance, and mechanical stability are critical performance factors.
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Company
Shaanxi KeGu New Material Technology Co., Ltd
Location
5# Chaoyang Road,Weicheng Sub-district，Qinhan New City, Xixian New Area, Xi'an Shaanxi Province,China,712039
Contact Person
Yuki