GRM4201 Dry Vacuum Pump 4200 M³/H Oil Free PMSM Drive ISO160 KF50 For HJT Lithium Battery
Price:
USD 25,000-45,000 / Set
MOQ:
1 Set
Delivery Time:
25-40 working days
Brand:
GRM
Product Description
GRM4201 Dry Vacuum Pump
The GRM4201 is a high-capacity 4200 m³/h dry vacuum pump achieving exceptional vacuum levels with wide working pressure range and superior dust handling. With dual-end bearing support, water-cooled fully sealed motor, and smart PLC one-button control, it is ideal for HJT cell manufacturing, lithium battery production, and semiconductor Load-Lock rapid evacuation.
Key Features
- Water-cooled fully sealed permanent magnet synchronous motor with VFD drive maximizes torque output for demanding processes while eliminating oil leakage risk.
- Unique rotor design manufactured on advanced equipment with excellent geometric precision, fully interchangeable for low noise and extended service life.
- Dust and Water Vapor Tolerant — Insensitive to dust and water vapor entrained in the pumped gas stream.
- Compact and Integrated Design — Small footprint with high system integration for easy installation in crowded fab environments.
- Comprehensive Protection — Built-in protection functions with strong adaptive capability for varying process conditions.
- Low Vibration and Noise — Operates at ≤75 dB(A) at ultimate pressure for a quieter workplace.
- Advanced Sealing System — Advanced lip seal with labyrinth oil barrier provides superior sealing performance and extended service life. Combined with nitrogen gas seal purge, prevents process media contamination of the oil reservoir, achieving a completely oil-free vacuum environment.
- Remote Control and Monitoring — Supports I/O interface and RS485 communication (Modbus protocol) for seamless integration into factory automation systems.
- Dual-End Bearing Support Design — Provides reliable rotor support, extremely low vibration, and superior startup reliability, making it ideal for harsh process conditions.
- Water-Cooled Fully Sealed Motor — High-efficiency PMSM with VFD drive maximizes torque output. Fully sealed motor design eliminates oil leakage risk, enhancing operational reliability and extending service life.
- Intelligent PLC Control System — Smart programming enables one-button start/stop. Supports external I/O interface and RS485 communication (Modbus-RTU protocol) for remote control and monitoring integration.
Technical Specifications
| Parameter | Specification |
|---|---|
| Pumping Speed | 4200 m³/h |
| Ultimate Pressure | ≤0.5 Pa |
| Rated Power | 13+10 kW |
| Voltage | 380V Three-Phase |
| Cooling Water Pressure | 0.2-0.5 MPa |
| Cooling Water Flow | 8-10 L/min |
| Cooling Water Temperature | 5-25 °C |
| Cooling Water Connection | G3/8 |
| N2 Purge Pressure | 0.1-0.7 MPa |
| N2 Purge Flow | 0-120 L/min |
| N2 Purge Connection | G1/4 |
| Inlet Connection | ISO160 |
| Outlet Connection | KF50 |
| Noise Level | ≤75 dB(A) |
| Operating Environment | 5~40°C; ≤80% RH |
| Weight | 269 kg |
| Dimensions (L*W*H) | 1695*600*1450 mm |
Application Processes
Clean Processes
Load-Lock, Transfer, Metrology, Lithography
Medium Processes
PVD Process, PVD Pre-Clean, RTA, Strip/Ashing, Oxide Etch, Silicon Etch, Implant Source, Metal Etch
Harsh Processes
HDP-CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, ALD
Target Industries
- Heterojunction (HJT) Solar Cell: PECVD process vacuum requirements.
- Lithium Battery Industrial: Large-scale vacuum drying and electrolyte processing.
- Semiconductor: Load-Lock rapid evacuation and process chamber roughing.
- Vacuum Coating: Industrial PVD/CVD coating system load-lock applications.
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.
Location
#3,No.152 Kangzhuang Rd,Zhoushi Town,Kunshan city,Suzhou,PRC.
Contact Person
Joyce