Dry Vacuum Pumps
GRM1201 1200 M³/H ISO160 KF25 Dry Pump For Semiconductor PV
The GRM1201 is a 1200 m³/h dry vacuum pump with low power consumption and high pumping speed for large exhaust volume applications. It handles flammable, explosive, and condensable process gases, designed for demanding PECVD, MOCVD, and SIC-CVD processes.
GRM601 600 M³/H Dry Vacuum Pump ISO100 KF25
The GRM601 is a 600 m³/h dry vacuum pump offering low power consumption and high pumping speed. It safely handles flammable, explosive, and condensable process gases, engineered for PECVD, MOCVD, and SIC-CVD semiconductor processes.
GRH3001 3000 M³/H dry type vacuum pump with Permanent Magnet Synchronous Motor
The GRH3001 is a 3000 m³/h dry vacuum pump built for medium-to-large scale semiconductor and photovoltaic manufacturing. It combines an oil-free pump chamber, compact design, and low energy consumption for reliable high-volume performance.
GRH1202 1200 M³/H Dry Vacuum Pump For Semiconductor Photovoltaic
The GRH1202 is a 1200 m³/h dry vacuum pump engineered for semiconductor, photovoltaic, and lithium battery manufacturing processes. It features a completely oil-free pump chamber, compact footprint, and low energy consumption, delivering reliable performance with low total cost of ownership.
GRM201 PMSM 200 M³/H Dry Running Vacuum Pump ISO63 KF25
The GRM201 is a 200 m³/h dry vacuum pump delivering low power consumption and high pumping speed. It safely handles flammable, explosive, and condensable process gases, making it suitable for PECVD, MOCVD, and SIC-CVD semiconductor processes with high reliability and low maintenance costs.
GRH6001 6000 M³/H Dry Running Pump Oil Free 380V Three Phase
The GRH6001 is a high-capacity 6000 m³/h dry vacuum pump engineered for large-scale semiconductor and photovoltaic production lines. It features an oil-free pump chamber, compact footprint, and low energy consumption for demanding high-volume applications.
380V Three Phase Dry Vacuum Pump GRH1802 1800 M³/H
The GRH1802 is an 1800 m³/h dry vacuum pump designed for demanding semiconductor and photovoltaic processes. With an oil-free pump chamber, compact footprint, and low energy consumption, it delivers reliable performance with robust dust handling capability.
GRM4201 Dry Vacuum Pump 4200 M³/H Oil Free PMSM Drive ISO160 KF50 For HJT Lithium Battery
The GRM4201 is a high-capacity 4200 m³/h dry vacuum pump achieving exceptional vacuum levels with wide working pressure range and superior dust handling. With dual-end bearing support, water-cooled fully sealed motor, and smart PLC one-button control, it is ideal for HJT cell manufacturing, lithium battery production, and semiconductor Load-Lock rapid evacuation.