GRM41 Dry Vacuum Pump System 600 L/min KF40 PMSM Energy Efficient Drive for Semiconductor Vacuum Coating
Price:
Negotiable
MOQ:
1 Set
Delivery Time:
15-30 working days after order confirmation
Brand:
OEM
Product Description
GRM41 Dry Vacuum Pump System
The GRM41 is a high-performance oil-free dry vacuum pump system engineered for demanding high-purity vacuum processes in semiconductor manufacturing, photovoltaic cell production, and flat panel display fabrication. Equipped with a PMSM (Permanent Magnet Synchronous Motor) energy-efficient drive delivering 0.75 kW output, this compact system achieves an impressive 600 L/min (36 m³/h) maximum pumping speed with an ultimate pressure of ≤1 Pa. The integrated RS485 remote monitoring interface enables seamless integration into automated production environments.
Key Features
- PMSM Energy Efficient Drive: Permanent magnet synchronous motor technology delivers superior energy efficiency with 0.75 kW power consumption, reducing operational costs while maintaining high performance.
- Oil-Free Dry Operation: No oil contamination risk in process chambers, ensuring ultra-clean vacuum conditions essential for semiconductor and photovoltaic manufacturing.
- High Vacuum Performance: Achieves ultimate pressure of ≤1 Pa (gas ballast closed) and ≤10 Pa (gas ballast open), suitable for demanding high-vacuum applications.
- Integrated Gas Ballast System: Built-in gas ballast valve with PT1/4 connection handles water vapor up to 350 g/h, preventing condensation and extending pump service life.
- RS485 Remote Monitoring: Intelligent control interface supports remote operation, parameter monitoring, and diagnostic capabilities for Industry 4.0 integration.
- Compact Lightweight Design: Dimensions of 630*347*400mm and weight of only 54 kg allow easy installation in space-constrained cleanroom environments.
- Low Noise Operation: Noise level ≤65 dB with integrated silencer and check valve, ensuring comfortable working environments.
- Robust Construction: Aluminum alloy and cast iron housing with fluoroelastomer (FKM) seals ensure long-term reliability and chemical compatibility.
- KF Standard Interfaces: KF40 inlet and KF25 exhaust connections for quick, tool-free assembly with standard vacuum components.
Technical Specifications
| Parameter | Specification |
|---|---|
| Model | GRM41 |
| Type | Dry Vacuum Pump System |
| Maximum Pumping Speed | 600 L/min (36 m³/h) |
| Ultimate Pressure (Gas Ballast Open) | ≤10 Pa |
| Ultimate Pressure (Gas Ballast Closed) | ≤1 Pa |
| Max Continuous Inlet Pressure | 1000 mbar |
| Exhaust Pressure | ≤3000 Pa |
| Motor Power | 0.75 kW |
| Motor Type | PMSM (Permanent Magnet Synchronous Motor) |
| Power Supply | 200-240V, Single Phase, 50/60Hz |
| Rated Current | 2.4 A |
| Inlet Connection | KF40 |
| Outlet Connection | KF25 |
| Gas Ballast Connection | PT1/4 |
| Gas Ballast Pressure | 0.02-0.05 MPa |
| Max Water Vapor Capacity | 350 g/h |
| Noise Level | ≤65 dB |
| Oil Volume | 0.25 L |
| Weight | 54 kg |
| Dimensions (L*W*H) | 630*347*400 mm |
| Protection Class | IP20D |
| Control Interface | RS485 Remote Monitoring |
| Ambient Temperature | 5-40 ℃ |
Typical Applications
- Semiconductor wafer processing and fabrication
- Photovoltaic cell manufacturing (PVD, PECVD, etching)
- Flat panel display and OLED production
- Vacuum coating and thin film deposition
- Research and laboratory high-vacuum systems
- Laser and optics industry
- Analytical instrumentation backing pump
- Load lock chamber evacuation
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.
Location
#3,No.152 Kangzhuang Rd,Zhoushi Town,Kunshan city,Suzhou,PRC.
Contact Person
Joyce