Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
I. Overview
LR-A426 is an integrated in-situ spectroscopic ellipsometer designed for organic/inorganic coatings. The need for membrane process research is to develop customized in-situ film online monitoring technology. Develop and rapidly implement in-situ characterization and analysis of optical films.
II. Test Cases
Film-forming process monitoring
Film thickness characterization
III. Product Applications
It is widely applied in the physical/chemical vapor deposition, ALD deposition and other optical film processing procedures of metal films, organic films and inorganic films. It can conduct in-situ online monitoring during the process and provide real-time feedback on the measured physical property data.
Integrated In-situ Spectroscopic Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Technical Specification
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Incident angle |
65° |
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Beam deviation |
< 0.3° |
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Measurement parameters |
Psi&Del,TanPsi&CosDel,Alpha&Beta |
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Polarizers |
Glan-Thompson |
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Material |
a-BBO |
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Compensator |
quarter-wave phase delay, hyper achromatic |
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Intensity selection |
Linear optical density selection element. Ensures good signal-to-noise ratio in measurement process, improves data accuracy, |
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Optical design |
dual fiber convey the light from lamp to spectrometer through polarization elements;stable light path, convenient to change lamps |
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Fiber |
anti-UV passivation; NA=0.22;clear aperture 600um |
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Micro light spot |
diameter ≤200um, to distinguish between the useful light reflected from front surface and the useless light reflected from the |
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Slit |
1 50um, for distinguishing between the useful light reflected from front surface and the useless light reflected from the bottom |
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