Equipment Introduction

This Perovskite P1/P4 laser scribing and edge cleaning machine can perform P1 laser scribing: removing the TCO layer, with the resistance on both sides of the P1 scribe line exceeding 20 MΩ, no TCO residue inside the scribe channel, and no damage to the glass substrate. Meanwhile, it can also perform P4 laser edge cleaning: using laser technology to remove the deposited film at the cell edge, reserving the area for subsequent packaging, removing all film layers above the substrate without damaging the substrate.

Highlights

・Adopts self-developed laser and optical design, supporting beam shaping. Spot size is adjustable from 20-100μm, and 500μm or 1000μm spots can be customized.

・Supports high-speed scribing with focusing lens or combined etching with galvanometer.

・The whole machine adopts modular and flexible design. P1/P4 functions can be integrated on one equipment with simple operation.

・Equipped with high-precision vision positioning system, stitching accuracy < 3μm.

・Self-developed dust extraction system, air-blowing system and focus tracking system.

Technical Parameters