Guangdong Zhongda Vacuum Equipment Co., Ltd.
                                                                                                           
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23 Years
Since 2003
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Evaporation Vacuum Coating Machine for High Precision Optical Films with Stable Rotation and Ion Source

Price Negotiable
Price: Negotiable
MOQ: 1
Delivery Time: 45-60 work days
Brand: Zhongda
Product Description
Evaporation Vacuum Coating Machine for High Precision Optical Films
Advanced vacuum coating system designed for depositing high-precision optical multilayer films on glass, PC, and PMMA substrates with stable rotation and ion source technology.
Key Features
  • Precision vacuum coating for high-precision optical multilayer films on glass, PC, and PMMA substrates
  • Customizable components to meet specific customer requirements for superior film quality
  • Central rotation mode (revolution) substrate umbrella frame minimizes vibration and particle generation
  • Electron beam heating method without electrode plates ensures stable multi-layer film formation
  • Proprietary ratio control method with multi-point online monitoring for precision optical films
  • Removable substrate umbrella frame with well-operated lift mechanism
  • Ion source with uniformly distributed high ion current density and dual electron guns
  • Capable of processing more than 100 layers with multi-point and ring-shaped crucibles
  • Fully automated evaporation process through automatic evaporation control system
  • Choice of bell jar type or planetary type workpiece rack configurations
System Configuration
Component Specifications
Fixture System Rotating umbrella frames on center, single or split configuration
Heating System Halogen lamp/armored heater, up to 350℃
Exhaust System Low vacuum pump set + high vacuum pump set + cryogenic pump/Polycold
Vacuum Control Vacuum controller, Panning and Pirani vacuum gauges
Coating System Electron gun, oxygen-free copper crucible, impedance evaporation source, RF/Kaufman/Hall type ion source
Inflation System MFC or APC automatic pressure controller
Film Thickness Control Crystal controlled or light controlled
Control System PC + PLC integration
Application Specifications
AR Film Coating
Substrate glass transmittance > 91.5%
  • 420-680nm band: Average transmittance on one side > 95%, reflectance < 0.5% (average)
  • Average transmittance on both sides > 98%, reflectance < 0.5% (average)
Performance Advantages
  • Increased deposition rate for higher production output
  • High-precision processing capabilities for semiconductor, optoelectronics, and photonics applications
  • Durable construction with easy maintenance requirements

Get in Touch

Have questions about our products or want to discuss a custom order? Our team is ready to help you.

Company Guangdong Zhongda Vacuum Equipment Co., Ltd.
Location Lantang South road, Duanzhou Area, Zhaoqing city, Guangdong 526060 China
Contact Person Suzy Chen

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