Customizable Inline Chemical Heater Low Watt Density Design Inline Fluid Heater
Industrial Unmatched Semiconductor Process Inline Fluid Heater Inline Chemical Heater
Faster heatup: Single heater chamber sizes up to 18kW.
Rapid installation: Customized plumbing connections
Long heater life for reduced cost of ownership (COO):
Patented heater gas purge system continuously removes any chemical permeation and ensures long element life.
Long heater life and clean operating: Patented heater gas purge system continuously removes chemical permeation and ensures exceptionally long element life. This system also protects against any potential ionic contamination of the chemistry.
Rugged construction: Thick walled chamber provides long service life in the harshest high temperature applications.
Exceptionally clean performance: Thick fluoropolymersheath minimizes permeation. Element purge monitoring minimizes ionic contamination potential. Cleanroom assembly and testing ensures the highest manufacturing standards.
Outstanding chemical compatibility: All fluoropolymerwetted parts compatible with virtually any chemistry.
Excellent temperature stability: Low watt density design enables accurate control of process temperature.
Applications Include:
SC1: ammonium hydroxide (NH4OH), and hydrogen peroxide (H2O2)
SC2: hydrochlorice acid (HCl) and hydrogen peroxide Buffered oxide etch (BOE) process: hydrofluoric acid (HF) and ammonim fluoride (NH4F)
Nitride etch/strip: phosphoric acid (H3PO4)Various acids such as:
Hydrochloric (HCl)
Hydrofluoric (HF)
Acetic (C2H4O2)
Nitric (HNO3)
Sulfuric (H2SO4)
Sulfuric acid and hydrogen peroxide
Sulfuric acid and ozone (O3)
Hydrofluoric acid and glycol (C2H6O2)
Potassium hydroxide (KOH)
Sodium hydroxide (NaOH)
Electroless nickel Electroless copper Electroless gold Deionized water
Some solvents (consult factory)
Benefits and Specifications
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Unmatched heating of semiconductor process fluids upto 210°C.
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Patented heater gas purge system ensures long element life and reduced cost of ownership.
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Thick walled chamber provides long service life in the harshest high temperature applications.
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Element purge monitoring minimizes ionic contamination potential. Cleanroom assembly and testing ensures the highest manufacturing standards.
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All fluoropolymer wetted parts provide outstandingcompatibility with virtually any chemistry.
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Low watt density design enables precise and stable control of process temperature.
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PVDF high temperature mounting brackets (Hightemperature model)
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Options:
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Horizontally mounted configuration
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Integral cooling coils
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100 ohm RTDs or “J”, “K”, or “E” type process and
element thermocouples
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Lower watt density heaters for special applications
Maximum Working Pressure:
• 100 PSIG (7 Bar) at 25oC
• 43 PSIG (. Bar) at 180oC
Heater Sizes: 1,000 watts up to 18,000 watts
Heater Voltages Available:
• 200 to 600 volts, single or three phase (12kW and
larger requires three phase).
Watt Density: 10 watts per square inch (1.5w/cm2)
Fluid Connections Available:
• 1⁄4” (6mm) to 1” (25mm) flared
• 1⁄2” (12mm) to 1” (25mm) Super 300 Type Pillar®•
Other connections available, consult factory
Applications
Semiconductor Wet Processes
Sterilization/Cleaning
Solar/Photovoltaic Wafer Cleaning
Safety Features
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Liquid level sensor
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Ground wire options
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Over-temperature thermocouple
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Process thermocouple
Specifications
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Heater
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PFA In-line Chemical Heater
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|---|---|
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Wattages
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1.5-12 kW
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Process Chemistries
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Dilute Hydrofluoric acids (DHF),
Buffered Hydrofluoric acids (BHF), Buffered Oxide etch (BOE), Alkaline Chemicals (TMAH, KOH, NAOH), Fluorinated Solvents, Hydrofluoric Acid, Glycol, and much more. |
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Max Operating Temperature
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180°C (consult factory
for higher temperatures) |
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Max Pressure
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40 psi at 180°C
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Voltages
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200-400VAC,
single or 3 phase model dependent |
Industries
- Semiconductor Fabrication
- Solar Cell Manufacturing
- Flat-Panel Display, LEDs & Electronics
- Chemicals Manufacturing
- Industrial Manufacturing
Others Applications
Precious Metal Deposition
Engineered to meet the most stringent requirements, accurate and reliable Heaters in Precious Metals' Deposition reduce materials waste. Low ripple Power Supplies provide clean and smooth direct current (DC), precision results while also saving on materials.
Products For General Metal Finishing |
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MOTS SINGLE
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MOTS SINGLE – DAS, PHOSPHATE
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MOTS TRIPLE – L SHAPED, DERATED
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MOTS SINGLE – BOTTOM, DERATED .
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MOTS TRIPLE – L SHAPED
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6HS SERIES – TUBULAR
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| 9HX SERIES Low watt density, 9 element fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions. Three phase. 3000-18000 watts, 208-600 volts.  |
6HX SERIES Low watt density, 6 element fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions. Three phase. 2000-12000 watts, 208-600 volts.  |
3HXOL SERIES Low watt density, 3 element, bottom heater. Fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions . 3000-18000 watts, 208-480 volts.
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Get in Touch
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