Semiconductor Special Gas Process Centrifugal Impeller For HF And Cl2
Price:
Single item，100-30000 USD
MOQ:
1 Pcs
Delivery Time:
7-30 days
Brand:
LAISHUN
Product Description
Semiconductor Special Gas Process Centrifugal Impeller
This semiconductor special gas process centrifugal impeller features dual treatment of channel electropolishing and passivation, making it suitable for handling strong corrosive special gases such as HF and Cl₂. The product maintains cleanliness meeting SEMI Grade 1 standards, ensuring ultra-high purity and extreme corrosion resistance for advanced semiconductor manufacturing gas delivery systems.
Technical Overview
Purpose-built for semiconductor manufacturing applications, this centrifugal impeller integrates full flow channel electrochemical polishing and precise passivation. The electropolishing process eliminates micro-scale surface irregularities, burrs, and residual contaminants, forming a smooth, low-adsorption metal surface enriched with chromium oxide. The subsequent passivation process constructs a dense, inert protective layer that effectively blocks direct contact between the base material and harsh media.
Delivers stable long-term performance when handling highly corrosive special gases including hydrogen fluoride (HF) and chlorine (Cl₂). The entire flow path's cleanliness strictly meets SEMI Grade 1 standards, drastically reducing risks of particle shedding, metal ion outgassing, and medium-induced corrosion.
Manufacturing Specifications
| Processing Technology | CNC machining, CNC milling, CNC turning, 3-axis to 5-axis machining, large gantry five-axis, wire electrical discharge cutting, laser cutting, drilling, bending, stamping, die casting, vacuum casting, injection molding, rapid prototyping, sheet metal fabrication, and multi-step processing |
|---|---|
| Processed Materials | Iron, aluminum, stainless steel 304, 346L, titanium alloys TC4, TC11, TC21, TC22, superalloy GH4169, ductile iron, and customer-specified metal materials for processing and casting |
| Precision Tolerance | ± 0.01 mm |
| Surface Roughness | Ra 0.8-1.6 μm |
| Heat Treatment & Surface Hardening | Annealing, tempering, quenching, surface hardening (carburizing, carbonitriding), nitriding (gas, ion/plasma), induction hardening, flame hardening, vacuum heat treatment, low-temperature treatment |
| Surface Treatment | Anodizing, bead spraying, wire mesh, PVD electroplating, zinc/nickel/chromium/titanium electroplating, brushing, painting, powder coating, sandblasting, passivation, electrophoresis, electropolishing, embossing, laser/etching/engraving |
Quality Assurance
Products undergo multi-layer quality inspection before leaving the factory. For five-axis five-linkage machining centers, we maintain an error of ±0.02mm. Additional testing includes dynamic balance accuracy and overspeed testing to ensure optimal performance.
Additional Services
- Processing Method: Customized according to provided CAD drawings (2D/PDF/CAD/DWG/DFF) and 3D files (IGES/STEP/VDA)
- Packaging: Customized packaging to prevent damage during transportation
- Logo: Custom logo application available
- Certificate: ISO 9001 certified
- Minimum Order Quantity: MOQ = 1
- OEM/ODM Support: Full support for custom precision parts and partnership development
Customization Services: We welcome your customization requirements and look forward to establishing productive OEM/ODM partnerships for your precision part needs.
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Chongqing Laishun Machinery Manufacturing Co., Ltd
Location
No. 158-5 Donghe Road, Degan Street Industrial Park, Jiangjin District, Chongqing (Building 1-1, Laishun Machinery Manufacturing Plant 1)
Contact Person
Guo