Acid Alkali Resistant Quartz TC Tube High Purity Glass Tube for Semiconductor Temperature Sensing

1. Ultra-High Purity – Zero-Contamination Temperature Measurement

• SiO₂ purity ≥ 99.99%, premium grades up to 99.999%
• No devitrification, volatilization or particle shedding at high temperatures
• Never introduces metal contamination into the furnace atmosphere
• A key safeguard for semiconductor wafer yield — impurity contamination can scrap an entire wafer batch

2. Extreme Heat Resistance for Demanding Processes

• Long-term service temperature 1100°C – 1200°C, short-term up to 1450°C
• Softening point approx. 1700°C, far higher than ordinary glass and metal sheaths
• Structurally stable at high temperatures — no softening or deformation
• Compatible with diffusion, oxidation, annealing, CVD and other high-temperature processes

3. Fast Thermal Response – Accurate, Stable Measurement

• Thin wall, high density and good thermal conductivity
• Fast thermal response with timely temperature signal transmission
• Low porosity, minimal signal drift, stable measurement accuracy over long-term use
• Provides a reliable basis for closed-loop process temperature control

4. Strong Corrosion Resistance – Superior Chemical Inertness

• Resists strong acids (except hydrofluoric acid), weak alkalis and most corrosive atmospheres
• No reaction with halogens, chlorine, oxygen or other process gases at high temperatures
• Effectively resists erosion by furnace gases, dust and molten materials
• Service life far exceeds stainless steel and ceramic sheaths

5. Thermal Shock Resistant – No Cracking Under Rapid Temperature Changes

• Ultra-low thermal expansion coefficient (5.5×10⁻⁷/°C)
• No cracking or fracturing under sudden temperature changes
• Suitable for batch processes with frequent heating and cooling cycles

6. High Electrical Insulation – Electrical Safety

• Excellent high-temperature electrical insulation
• Eliminates leakage interference between thermocouple wires and from wires to the furnace body
• Ensures clean, safe and reliable measurement signals

7. Complete Specifications – Deep Customization

• Structures: closed-end tube (one end sealed, standard), open tube, two-bore tube
• Outer diameter: φ2mm – φ50mm (selected per thermocouple specification)
• Wall thickness: 0.5mm – 5mm customizable
• Length: customizable up to 3 meters or more
• Processing: flame-polished sealed ends, flanging, flange fitting, diameter reduction, frosting
• Compatibility: fits K, S, R, B and other thermocouple types