High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization
High precision SIC silicon carbide ceramic chuck ceramic element vacuum sucker customization
Product summary
Silicon carbide ceramic chuck/tray is a high-performance fixture used in semiconductor, LED, photovoltaic and other precision manufacturing fields, mainly used to fix and carry wafers, sapphire substrates, silicon wafers and other materials. Its core material is silicon carbide (SiC), which is made by precision machining, has excellent physical and chemical properties, and can meet the processing needs of high precision and high stability.
Product Parameter
| (Material property) | (Unit) | (ssic) | |
| (SiC content) | (Wt)% | >99 | |
| (Average grain size) | micron | 4-10 | |
| (Density) | kg/dm3 | >3.14 | |
| (Apparent porosity) | Vo1% | <0.5 | |
| (Vickers hardness) | HV 0.5 | GPa | 28 |
| *() Flexural strength* (three points) |
20ºC | MPa | 450 |
| (Compressive strength) | 20ºC | MPa | 3900 |
| (Elastic Modulus) | 20ºC | GPa | 420 |
| (Fracture toughness) | MPa/m'% | 3.5 | |
| (Thermal conductivity) | 20°ºC | W/(m*K) | 160 |
| (Resistivity) | 20°ºC | Ohm.cm | 106-108 |
(Thermal expansion coefficient) |
a(RT**...80ºC) | K-1*10-6 | 4.3 |
(Maximum operating temperature) |
oºC | 1700 | |
Product feature
1.Ultra-high hardness and wear resistance: silicon carbide hardness close to diamond, excellent wear resistance, can withstand long-term high strength processing, significantly extend the service life.
2. Excellent thermal management performance: high thermal conductivity and low thermal expansion coefficient to ensure rapid heat dissipation in high temperature environments and maintain dimensional stability to avoid deformation caused by thermal stress.
3. Excellent chemical stability: strong corrosion resistance, able to withstand acids, alkalis and a variety of chemical solvents, suitable for harsh process environment.
4. High flatness and surface finish: After precision machining, the surface flatness is up to micron level, ensuring high precision and low pollution during processing.
Product application
In semiconductor manufacturing, silicon carbide ceramic chuck can be used for wafer cutting, polishing, lithography and other key processes to ensure high precision processing. As a bearing platform for sapphire substrate processing in LED production, it supports cutting, grinding and epitaxial growth.
In addition, silicon carbide ceramic chucks are used as trays in high temperature equipment such as CVD and PVD, using high temperature processes to withstand extreme environments and maintain stability. In the photovoltaic industry, it is used for silicon wafer cutting and thin film solar cell manufacturing to improve processing efficiency and yield.
Product display
Product Q&A
1.Q: What is silicon carbide ceramic chuck?
A: Silicon carbide ceramic chucks are a high-performance fixture for semiconductor, LED and photovoltaic manufacturing, mainly used to hold and carry wafers, sapphire substrates and other materials, with high hardness, high thermal conductivity and excellent chemical stability.
2.Q: What are the main advantages of silicon carbide ceramic chuck?
A: The main advantages of silicon carbide ceramic chucks include high wear resistance, excellent thermal management performance, high flatness and corrosion resistance, which can meet the needs of high-precision machining and high-temperature processes.
Tag: #SIC, #silicon carbide ceramic chuck, #ceramic element, #vacuum sucker customization, #High precision
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