SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm
SiC Ceramic Optical Path Board Introduction
SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm
A Silicon Carbide (SiC) Optical Path Board is a high-precision optical substrate manufactured from ultra-high-purity silicon carbide ceramic, specifically designed for dual optical path systems in wafer inspection equipment. It leverages the core material properties of silicon carbide—exceptional hardness, ultra-low coefficient of thermal expansion, high thermal conductivity, and high refractive index—to provide a stable, thermally stable reference platform for optical sensors and imaging systems. Through precision grinding and polishing processes, it achieves nanoscale flatness and surface roughness. Its excellent chemical inertness and high stiffness ensure long-term performance in harsh semiconductor manufacturing environments, significantly enhancing inspection accuracy and equipment reliability.
SiC Ceramic Optical Path Board Key Technical Data
|
Parameter Category |
Parameter Name |
Typical Value/Range |
|
Material Characteristics |
Material Purity |
SiC ≥99.999% |
|
Coefficient of Thermal Expansion |
~4.5×10⁻⁶/℃ |
|
|
Thermal Conductivity |
120–270 W/(m·K) |
|
|
Refractive Index |
2.6–2.7 |
|
|
Elastic Modulus |
>400 GPa |
|
|
Functional Characteristics |
Surface Flatness |
≤1 μm |
|
Surface Roughness (Ra) |
≤0.01 μm |
|
|
Operating Temperature |
-50℃ ~ 500℃ |
SiC Ceramic Optical Path Board Characteristics
| Feature Category | Parameter Name | Value/Specification |
| Weight Optimization | Ultra-Lightweight |
Achieved via structural design and material selection
|
| Environmental Stability | Ultra-High Stability |
Exceptional resistance to thermal/mechanical stress
|
| Thermal Performance | Coefficient of Thermal Expansion |
Ultra-Low (e.g., ~4.5×10⁻⁶/℃)
|
| Mechanical Property | Stiffness |
High (e.g., Elastic Modulus >400 GPa)
|
| Material Integrity | Density |
High (e.g., ≥3.1 g/cm³)
|
| Precision Metrics | Surface Flatness & Parallelism |
≤0.02 mm
|
| Dimensional Capability | Maximum Size |
900 × 900 mm
|
SiC Ceramic Optical Path Board Main Application Areas
Silicon Carbide Optical Path Boards are critically applied in the following high-end fields due to their outstanding performance:
- Semiconductor Inspection Equipment: Serves as the core substrate in dual optical path systems for wafer defect detection, film thickness measurement, and overlay accuracy analysis, ensuring optical path stability and measurement repeatability.
- AR/VR Optical Systems: Used as a diffractive waveguide lens substrate (e.g., Meta Orion AR glasses), supporting wide field of view (70°+), low rainbow artifact display, and lightweight design (density ~3.1 g/cm³).
- High-End Photoelectric Instruments: Functions as an optical platform in laser interferometers and spectral analysis equipment, reducing thermal drift and environmental vibration impacts on precision.
- Photovoltaics and New Energy: Applied as a heat dissipation substrate for photovoltaic inverter power modules, utilizing its high thermal conductivity to improve cooling efficiency.
About ZMSH
ZMSH specializes in the customized services of silicon carbide (SiC) optical path boards. With sufficient reserves of ultra-high-purity silicon carbide raw materials (purity ≥99.999%), and leveraging advanced pressureless sintering and precision machining technologies (such as nanoscale mirror polishing and micro-channel processing), it can precisely control product performance. The company is equipped with fully automated production lines and a strict quality inspection system, supporting one-stop customization from design, prototyping to mass production, covering personalized needs for dimensions, shapes, hole positions, and functional characteristics (e.g., flatness ≤0.02mm). Simultaneously, we possess a comprehensive global logistics network and a rapid response mechanism to ensure efficient order delivery, providing high-reliability and high-performance silicon carbide ceramic solutions for fields such as semiconductors, optoelectronics, and new energy.
Q&A
1. Q: What are the key advantages of silicon carbide (SiC) optical path boards?
A: They offer ultra-low thermal expansion (~4.5×10⁻⁶/℃), high thermal conductivity (120–270 W/m·K), and exceptional stiffness (>400 GPa), ensuring nanoscale flatness (≤0.02mm) and stability under extreme conditions for precision optical systems.
2. Q: Where are silicon carbide optical path boards commonly used?
A: They are primarily used in semiconductor wafer inspection equipment (e.g., dual-optical-path baseplates), AR/VR waveguide substrates, laser interferometers, and high-power photonic devices due to their ability to maintain optical alignment and thermal stability.
Tags: #SiC Ceramic Optical Path Board, #Customized, #Wafer Inspection Equipment, #Parallelism ≤0.02mm
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