Dummy Grade 6Inch Sic Substrate Wafer Dia150mm 4H-N 500mm Thickness
Price:
by case by FOB
MOQ:
1pcs
Delivery Time:
within 40days
Brand:
zmsh
Product Description
6inch sic substrates ,6inch sic wafers, sic crystal ingots ,
sic crystal block ,sic semiconductor substrates,Silicon Carbide Wafer
| 6 inch diameter, Silicon Carbide (SiC) Substrate Specification | ||||||||
| Grade | Zero MPD Grade | Production Grade | Research Grade | Dummy Grade | ||||
| Diameter | 150.0 mm±0.2mm | |||||||
| ThicknessΔ | 350 μm±25μm or 500±25un | |||||||
| Wafer Orientation | Off axis : 4.0° toward< 1120> ±0.5° for 4H-N On axis : <0001>±0.5° for 6H-SI/4H-SI | |||||||
| Primary Flat | {10-10}±5.0° | |||||||
| Primary Flat Length | 47.5 mm±2.5 mm | |||||||
| Edge exclusion | 3 mm | |||||||
| TTV/Bow /Warp | ≤15μm /≤40μm /≤60μm | |||||||
| Micropipe Density | ≤1 cm-2 | ≤5 cm-2 | ≤15 cm-2 | ≤100 cm-2 | ||||
| Resistivity | 4H-N | 0.015~0.028 Ω·cm | ||||||
| 4/6H-SI | ≥1E5 Ω·cm | |||||||
| Roughness | Polish Ra≤1 nm | |||||||
| CMP Ra≤0.5 nm | ||||||||
| Cracks by high intensity light | None | 1 allowed, ≤2 mm | Cumulative length ≤ 10mm, single length≤2mm | |||||
| Hex Plates by high intensity light | Cumulative area ≤1% | Cumulative area ≤2% | Cumulative area ≤5% | |||||
| Polytype Areas by high intensity light | None | Cumulative area≤2% | Cumulative area≤5% | |||||
| Scratches by high intensity light | 3 scratches to 1×wafer diameter cumulative length | 5 scratches to 1×wafer diameter cumulative length | 5 scratches to 1×wafer diameter cumulative length | |||||
| Edge chip | None | 3 allowed, ≤0.5 mm each | 5 allowed, ≤1 mm each | |||||
| Contamination by high intensity light | None | |||||||
Because the 6inch size crystal grow ＆process(lapped and polishing) technical difficulties,we just can provide the 6inch Dummy Grade as common products in 30days and Productions Grade but needing to be reserved for 90days.
About our company
SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014.
We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components widely used in electronics, optics, optoelectronics and many other fields. We also have been working closely with many domestic and oversea universities, research institutions and companies, provide customized products and services for their R&D projects.
It's our vision to maintaining a good relationship of cooperation with our all customers by our good reputatiaons.
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Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
SHANGHAI FAMOUS TRADE CO.,LTD
Location
Room.1-1810,No.1079 Dianshanhu Road,Qingpu Area Shanghai city, China /201799
Contact Person
Wang