Zirconium Zr702 High Purity Metal Sputtering Targets

Zirconium is an active metal with a great affinity for oxygen, and the excellent corrosion resistance of the oxide film determines that it can be competent in multiple corrosive environments.

Zirconium has good corrosion resistance in nitric acid not more than 90% below 200℃. However, the stress corrosion cracking sensitivity of zirconium in nitric acid should be noted.
 

Zirconium is resistant to corrosion in all caustic soda solutions with even concentration. Corrosion resistance exceeds tantalum, niobium and titanium.

Applications Of Zirconium Sputtering Target

Zirconium Sputtering Targets with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications.

Sputtering targets:

Thickness: 0.04 to 1.40" (1.0 to 35mm).

Width up to 20"(50 to 500mm).

Length: 3.9" to 6.56 feet( 100-2000mm)

other sizes as requested.

Cylinder sputtering targets:

3.94 Dia. x 1.58"(100 Dia. x 40mm)

2.56 Dia. x 1.58" (65 Dia. x 40mm)

or 63*32mm other sizes as requested.

Tube sputtering targets:

2.76 OD x 0.28 WT x 39.4”L (70 OD x 7 WT x 1000mm L)

3.46 OD x 0.39 WT x 48.4”L (88 OD x 10 WT x 1230mm L)

other sizes as requested.

Zirconium Sputtering Target, Zirconium Target are available in varying sizes

Quality test of Zr and Zr Plate/Sheet:

Tests and inspection ensure the materials meet all of the tests specifications of International standard.