Precision Ceramic Parts Semiconductor Wafer Chuck

The semiXicon porous vacuum chuck series are designed for application of handling thin films and other flexible work pieces. The chuck has uniform distributed pore sizes to assure desirable sucking and holding power for very thin films ,it is widely applied in electronic, semiconductor, ,solar,medical and optical laser microfabrication etc industries.

We can custom design per your application to turn them into individual working stations or integrate into your production lines.

Ceramic material: alumina, silicon carbide
Aperture: 1~100 μm
Porosity: 30%~60%
Bending strength: >50 MPa
Processing accuracy: ±0.003 mm, flatness 0.003 mm
Product features: wear resistance, high temperature resistance, high hardness, corrosion resistance
Available colors: beige, black
Custom processing: 6 inches, 8 inches

Applications:

Semiconductor
Thin film
Optical
Solar
MEMS
Battery
Biomedical
…