Ceramic Vacuum Chucks Filters Diffusers
Ceramic Vacuum Chucks, Ceramic Filters, Ceramic Diffusers, Ceramic Air Bearings, Ceramic Permeable Substrates
The range of Innovcera porous ceramic filters are made from aluminum oxide and silicon carbide. The strong, uniform porous ceramic has 40-50% open porosity with a tortuous pore structure and is available in pore sizes ranging from 6 to 90 microns.
Maximum Temperature
Up to 1000C for porous ceramic, limited only by sealants, gaskets and/or hardware materials.
Corrosion Resistance
Porous ceramics are resistant to most acids, except for Hydrofluoric Acid and Phosphoric Acid. In alkaline solutions, porous ceramics are resistant up to pH9. It is also resistant to organic solvents. The sealants, gaskets and/or hardware materials used, may be the limiting factor in certain fluids.
Characteristics Chart
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|
Product number |
Density g/cm3 |
Coefficient of elasticity GPa |
Bending strength MPa |
Coefficient of thermal expansion ×10-6/K |
Coefficient of thermal conductivity W/m・K |
Electrical resistance Ω・cm |
|---|---|---|---|---|---|---|---|
| Alumina | A995 | 3.9 | 380 | 450 | 7.3 | 30 | 30 |
| Alumina porous | - | 2.5 | 55 | 50 | 7.4 | - | 30 |
| Silicon carbide | Standard product | 3.1 | 410 | 500 | 4.6 | 170 | 170 |
| Silicon carbide porous | - | 2.1 | 55 | 50 | 4.7 | - | 26 |
Cleanability
Porous ceramic is cleanable by a variety of methods, depending on type of contaminant to be removed. Methods include spraying, brushing, backwashing, oven firing, dilute acid cleaning, solvent cleaning, steam cleaning and ultrasonic cleaning.
Porous ceramics are used for:
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Ceramic Vacuum Chucks
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Ceramic Filters
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Ceramic Diffusers
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Ceramic Air Bearings
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Ceramic Permeable Substrates
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Ceramic Dispersion Media
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Ceramic Ash Handling
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Ceramic Wicking Media
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Ceramic Fluidized Bed Plates
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Ceramic Specialty Spargers
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Ceramic Breathers – Vents
Porous ceramics are used where uniform controlled pore size is required in chemical process, semiconductor, pharmaceutical and manufacturing applications.
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