Gas Atomization Boron Nitride Ceramic Parts

Boron nitride belongs to the hexagonal system. Its structure is similar to graphite, and their properties are also similar. Therefore, it is also called " white graphite". It has good heat resistance, thermal stability, thermal conductivity, high temperature dielectric strength, and is an ideal heat dessipating material and high temperature insulatiing material. Mohs Hardness 2 can be processed into various shaped parts.

Main applications:

• Components for semiconductor equipment
  Plates, Wafer, Rings, Gas distribution plates, Nozzles
  Top nozzles or Baffles, Pedestal heaters, Cover plates
  RF windows, Crucibles
• Substrate
• Heat resistant base materials

Key Features & Specifications:

• Utilizes hot pressing technology
• Up to diameter of 650mm
• Very low porosity
• High themal conductivity
• Ultra chemical resistant
• Direct sintered to allow for net shape sintering
   

Materials Properties:

Manufacturing Processes:

Quality Control:

Core Technology: