High Quality E-Chuck Resistance Corrosion Sic Heating Elements
Price:
10USD/PC
MOQ:
1 PC
Delivery Time:
7 work days
Brand:
ZG
Product Description
High quality E-Chuck resistance corrosion
Custimize dielectric layers materials
Less than 0.1 seconds of clamping and de-clamping time
Microstructure(dimple)sizes:300microns diameter minimum
Typical global flatness:0.5-3mircon PV(D=300mm)
Standard clamping voltage 1-3kv (possible >15kv)
Microstructures (dimple)reduce contact area by a factor of100(1% contact area)
Capabilities of exceratec
ESC design according to customer's requirements
Manufacture new ESC totally new ESC manufacturing
Refurbish at level 1,2 and 3.
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Company
HENAN ZG INDUSTRIAL PRODUCTS CO.,LTD
Location
No. 26, Dongqing Street, High-tech Zone, Zhengzhou ,Henan, China
Contact Person
Daniel