High Hardness High Temperature Resistance Chemical Corrosion Resistance Ceramic Arm for Semiconductor Equipment
Price:
10USD/PC
MOQ:
1PC
Delivery Time:
5-8 working days
Brand:
ZG
Product Description
Ceramic Arm
Zirconia Ceramics
1. It has excellent wear resistance, chemical corrosion resistance, high-temperature resistance, and magnetic resistance, making it usable in extremely harsh environments without contaminating materials or the environment.
2. It features high toughness, high bending strength, and high wear resistance, as well as excellent thermal insulation properties, with a thermal expansion coefficient close to that of steel.
Nano Alumina
Due to its fine particle size, nano alumina can be used to make synthetic gemstones, analytical reagents, as well as nano catalysts and carriers. When used in luminescent materials, it can greatly enhance their luminescence intensity. For ceramics and rubber toughening, it is several times more effective than ordinary alumina, particularly in improving the density, surface smoothness, and thermal fatigue resistance of ceramics. Nano alumina is mainly used in key components of YGA laser crystals and integrated circuit substrates, and is also added to coatings to improve wear resistance.
1. It has excellent wear resistance, chemical corrosion resistance, high-temperature resistance, and magnetic resistance, making it usable in extremely harsh environments without contaminating materials or the environment.
2. It features high toughness, high bending strength, and high wear resistance, as well as excellent thermal insulation properties, with a thermal expansion coefficient close to that of steel.
Nano Alumina
Due to its fine particle size, nano alumina can be used to make synthetic gemstones, analytical reagents, as well as nano catalysts and carriers. When used in luminescent materials, it can greatly enhance their luminescence intensity. For ceramics and rubber toughening, it is several times more effective than ordinary alumina, particularly in improving the density, surface smoothness, and thermal fatigue resistance of ceramics. Nano alumina is mainly used in key components of YGA laser crystals and integrated circuit substrates, and is also added to coatings to improve wear resistance.
High-performance ceramic arm designed for semiconductor manufacturing applications requiring exceptional precision and durability.
Product Features
- Material Characteristics: High hardness, high temperature resistance, chemical corrosion resistance
- High-Precision Machining: Flatness of the nozzle position can be controlled within 0.02mm
- Customized Design: Customizable sizes (up to around 400mm) and hole positions, compatible with mainstream semiconductor equipment
Mechanical Properties
| Property | Unit | Silicon Carbide |
|---|---|---|
| Density | g/cm³ | 3.15 |
| Vickers Hardness | Hv0.5 | 2650 |
| Flexural Strength | MPa | 450 |
| Compressive Strength | MPa | 2650 |
| Elastic Modulus | GPa | 430 |
| Fracture Toughness | MPa*m¹/² | 4 |
| Poisson's Ratio | 0.14 | |
| Young's Modulus | GPa | 430 |
| Silicon Carbide Raw Material Purity | % | 99 |
Thermal Properties
| Property | Unit | Silicon Carbide |
|---|---|---|
| Thermal Conductivity at 25°C | W/mK | 110 |
| Melting Point | °C | 2800 |
| Specific Heat | J/g*K | 0.8 |
| Linear Expansion Coefficient | 10⁻⁶/K | 4 |
Electrical Characteristics
| Property | Unit | Silicon Carbide |
|---|---|---|
| Dielectric Constant | 1MHz | 10 |
| Breakdown Voltage | V/cm | 1×10⁶ |
| Dielectric Loss | 1MHz | 0.001 |
| Resistivity | Ω*cm | 10²-10⁶ |
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Company
HENAN ZG INDUSTRIAL PRODUCTS CO.,LTD
Location
No. 26, Dongqing Street, High-tech Zone, Zhengzhou ,Henan, China
Contact Person
Daniel