Silicon Carbide Components For Semiconductor Equipment
Silicon Carbide Components For Semiconductor Equipment
HuaCera silicon carbide has a thermal expansion coefficient that matches that of silicon,and possesses a high elastic modulus, high rigidity, chemical inertness, extremely high wear resistance, and dimensional thermal stability.
Using low-cost forming methods such as dry pressing and cold isostatic pressing,while maintaining a high level of purity (greater than 99.9%), it is an ideal choice for equipment used in semiconductor lithography, wafer metrology, bonding, and cleaning
processes.
Main applications include: vacuum chucks, precision components (guide rails, platforms, bases), silicon carbide mirrors, carriers, robotic arms, and other structural components, and can also be used as high-temperature furnace tubes.
- Good wear resistance and erosion resistance,
- High high temperature strength, good thermal shock stability,
- High thermal conductivity, small thermal expansion coefficient, etc.
- It is a high-performance refractory material.
- The main varieties include oxide-bonded silicon carbide bricks,
- carbon-bonded silicon carbide bricks,
- nitride-bonded silicon carbide bricks,
- self-bonded silicon carbide bricks,
- recrystallized silicon carbide bricks and semi-silicon carbide bricks, etc.
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