Borosilicate Glass Wafer 4'' 6'' 8'' for MEMS Devices - High Chemical Resistance with Silicon-Matched CTE
Price:
Negotiable
MOQ:
5 pcs
Delivery Time:
1-4 weeks
Brand:
BonTek
Product Description
High chemical resistance borosilicate glass wafers in 4", 6", and 8" diameters are engineered for MEMS devices and semiconductor applications. These precision wafers feature excellent thermal expansion compatibility with silicon, making them ideal for anodic bonding processes.
Applications
Borosilicate glass wafers serve critical roles in semiconductor and MEMS industries, including MEMS device encapsulation using Wafer-Level-Packaging (WLP) technology, and as blank substrates for semiconductor processing and optical applications.
Key Features
- Thermal expansion coefficient matched to silicon for perfect anodic bonding
- High chemical resistance and mechanical strength
- Excellent transmission across wide spectrum
- Suitable for high temperature processing
Wafer Specifications
| Specification | 4" (100mm) | 6" (150mm) | 8" (200mm) |
|---|---|---|---|
| Diameter | 100mm | 150mm | 200mm |
| Thickness | 0.10mm up | 0.30mm up | 0.40mm up |
| Primary Flat | 32.5mm | 47.5mm / 57.5mm / Semi-Notch | Semi-Notch |
| LTV (5mmx5mm) | < 0.5μm | < 0.5μm | < 0.5μm |
| TTV | < 2μm | < 3μm | < 3μm |
| Bow | ±20μm | ±30μm | ±40μm |
| Warp | ≤ 30μm | ≤ 40μm | ≤ 70μm |
| Edge Rounding | Compliant with SEMI M1.2 Standard / IEC62276 | ||
| Surface Type | Single Side Polished / Double Sides Polished | ||
| Polished side Ra | Ra ≤ 1nm | ||
| Back Side Criteria | Ra 0.2-0.7μm or Customized | ||
Material Properties (PYREX BF33)
| Density | 2.23 g/cm³ |
| Modulus of Elasticity | 63 kN/mm² |
| Knoop Hardness HK 0.1/20 | 480 |
| Poisson's Ratio | 0.2 |
| Dielectric Constant (@ 1 MHz & 25°C) | 4.6 |
| Loss Tangent (@ 1 MHz & 25°C) | 37 × 10⁻⁴ |
| Dielectric Strength (@ 50 Hz & 25°C) | 16 kV/mm |
| Refractive Index | 1.472 |
| Dispersion (nF - nC) | 71.9 × 10⁻⁴ |
Frequently Asked Questions
What are the products you mainly work on?
We specialize as piezo wafer experts, with 30 years of experience in Single Crystal Quartz, LiNbO3, LiTaO3, Quartz glass, LGS, and CTGS materials. We are the preferred supplier for quartz blanks with superior angle precision in AT, SC, and IT cuts.
Can you accept product customization?
Yes, we offer full customization capabilities and can fabricate according to your specifications. Our experienced team provides technical guidance for optimal wafer selection, and we maintain standard wafer inventory for immediate availability.
Can you deliver the goods via our courier agent?
We accommodate your preferred shipping method using DHL, FedEx, UPS, or other courier services. We optimize packaging to minimize shipping costs while ensuring product safety.
How can you guarantee we get what we want safely?
We employ robust packaging with buffer sponge protection and fragile labeling. In case of transit damage, we provide replacement or refund when proper acceptance procedures are followed.
Can we visit your factory?
Factory inspections are welcome for large quantity purchases and long-term partnerships. We also offer videoconferencing options for remote evaluations.
Acceptance Check Procedure
- Handle products with care upon receipt
- Inspect outer carton condition before opening
- Document packaging alignment with photos
- Open vacuum packages in clean room environments only
- If damage is found, photograph immediately without removing from packaging and contact us for resolution
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Hangzhou Freqcontrol Electronic Technology Ltd.
Location
Room 1106, CIBC, No.198 Wuxing Rd, Hangzhou, P.R.China
Contact Person
Xu