High-Performance Silicon Carbide Furnace Components with Extreme Temperature Resistance, Superior Mechanical Strength, and Exceptional Thermal Management
Price:
200-500 yuan/kg
MOQ:
Negotiable
Delivery Time:
Negotiable
Brand:
KEGU
Product Description
Silicon Carbide (SiC) Furnace Components | Paddles, Boats & Tubes for Semiconductor & Solar
Our Silicon Carbide (SiC) Furnace Components provide advanced ceramic solutions for demanding semiconductor and solar manufacturing processes. Engineered to withstand extreme temperatures up to 1900°C, these high-purity components deliver superior thermal shock resistance, exceptional mechanical strength, and contamination-free performance - offering significantly longer service life and higher throughput compared to traditional quartz alternatives.
Core Product Line & Applications
- SiC Paddle: Robust wafer boat holder for diffusion processes
- SiC Boat: Wafer carrier for boron/phosphorus diffusion in discrete semiconductor manufacturing
- SiC Dragon Wafer Boat: Specialized holder for high-temperature diffusion applications
- SiC Process Tube: Critical component for diffusion furnace systems
Key Technical Advantages
- Extreme Temperature Performance: Maintains structural integrity and chemical stability at 1900°C operating temperatures
- Superior Mechanical Properties: High flexural strength (up to 420 MPa) prevents deformation under heavy thermal loads
- Exceptional Thermal Management: Outstanding thermal shock resistance ensures reliability during rapid thermal cycling
- Ultra-High Purity Construction: Resists acid/alkali corrosion, preventing wafer contamination in sensitive processes
- Optimized Thermal Conductivity: Ensures uniform temperature distribution for consistent process results
Technical Performance Specifications
| Performance Parameter | UNIT | HS-A | HS-P | HS-XA |
|---|---|---|---|---|
| Grain Size | μm | 4-10 | 4-10 | 4-10 |
| Density | g/cm³ | ≥3.1 | 3.0-3.1 | >3.1 |
| Hardness (Knoop) | Kg/mm² | 2800 | 2800 | 2800 |
| Flexural Strength @ RT | MPa | 385 | 240 | 420 |
| Compressive Strength @ RT | MPa | 3900 | - | 3900 |
| Modulus of Elasticity @ RT | GPa | 410 | 400 | 410 |
| Fracture Toughness @ RT | MPa*m¹/² | 8 | 8 | 8 |
| Max. Service Temp. (Air) | °C | 1900 | 1900 | 1900 |
| Thermal Conductivity @ RT | W/m*K | 125.6 | 110 | 125.6 |
Primary Industrial Applications
- Semiconductor Manufacturing: Diffusion, CVD, and high-temperature processing
- LED Production: Epitaxial growth and wafer processing applications
- Solar Energy: Photovoltaic cell diffusion furnace systems
- Discrete Power Devices: Boron and phosphorus diffusion processes
Competitive Advantages
- Quality Assurance: Rigorous quality control ensures consistent performance across all batches
- Custom Engineering: Expertise in manufacturing components to precise customer specifications
- Reliable Delivery: Efficient production systems designed to meet critical project timelines
- Technical Support: Comprehensive application engineering and customer service
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Shaanxi KeGu New Material Technology Co., Ltd
Location
5# Chaoyang Road,Weicheng Sub-district，Qinhan New City, Xixian New Area, Xi'an Shaanxi Province,China,712039
Contact Person
Yuki