CVD Chemical Vapor Deposition Furnace 1000 Ordm C Melting Heating Furnace
| Attribute | Value |
|---|---|
| Range of Applications | Industrial |
| Type | Electric Holding Furnace |
| Usage | Ceramic Sintering |
| Fuel | Electric |
| Atmosphere | Nitrogen |
| Effective Chamber Dimensions | 640*640*250mm(W*H*D) |
| Transport Package | Wooden Packaging |
| Specification | 1200*1200*1500mm |
| Trademark | Chitherm |
| Origin | China |
| HS Code | 8514101000 |
| Supply Ability | 50 Sets/Year |
| Customization | Available |
| Certification | ISO |
| Place Style | Vertical |
MBF100-10 Type Chemical Vapor Deposition CVD Furnace 1000°C Melting Furnace Heating Furnace ISO Certified Electric Fuel
MBF100-10 Type Chemical Vapor Deposition Furnace
The MBF100-10 Type Chemical Vapor Deposition (CVD) Furnace is suitable for medium-temperature heat treatment of electronic products. It is primarily used for gas-phase reaction processes of related materials in atmospheres of nitrogen, helium, acetylene, and hydrogen. It can also be utilized for sintering processes of related materials under protective atmospheres.
- Rated Temperature: 750°C
- Maximum Temperature: 1000°C
- Heating Zone Dimensions: 770 × 770 × 300 mm (W × D × H)
- Effective Dimensions: 640 × 640 × 250 mm (W × D × H)
- Outer Chamber Material: SUS310S
- Inner Liner Material: Fused Quartz
- Product Size: Φ120
- Equipment Capacity: 16 substrates per batch
- Maximum Heating Power: 16 kW
- Heating Method: Bottom + Four Sides
- Temperature Control Points: Bottom + Side
- Thermocouple Type: K-Type
- Heating Rate: ≤8°C/min
- Heating Elements: FEC Ceramic Fiber Heaters
- Furnace Door Opening Method: Top-Opening Design
- Temperature Control Stability: ±1°C
- Temperature Control Instrument: Imported PID Controller with Auto-Tuning Function
- Program Steps: 20 steps
- Alarm and Protection: Over-temperature, thermocouple breakage, and other audible/visual alarms, with over-temperature power-off protection
- Surface Temperature Rise: <35°C
- Weight: about 500kg
- Furnace Dimensions: about 1200×1200×1500mm (W×H×D)
| Item | Note | QTY |
|---|---|---|
| Basic Compositions | ||
| Furnace | 1 unit | |
| Certificates of Inspection | Furnace and major purchased components | 1 Set |
| Technical Documents | Furnace specifications, technical documents of major purchased components, etc | 1 Set |
| Key Parts | ||
| Mass Flow Controller (MFC) | Yamatake or HORIBA | 4 Set |
| Touch screen | 1 PC | |
| Temperature Controller | 1 Set | |
| FEC Heater | 1 Set | |
| Quartz Liner | 1 Set | |
| Spares | ||
| SSR | 1 PC | |
4.1 Environmental conditions: Temperature 0 - 40°C, humidity ≤ 80% RH, no corrosive gas, no strong airflow disturbance.
4.2 Ground requirements: level, no obvious vibration, bearing capacity > 500Kg/m².
4.3 Power conditions: capacity greater than 22kVA, 3 phases 5 lines, voltage 220/380V, frequency 50Hz(according to local situation). Live wire: yellow, green, red, neutral wire: blue, ground wire: yellow-green.
4.4 Installation site: 1500mm×1500mm×3000mm (W×H×D), installation area greater than 2.5m².
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