High Precision Quartz Glass Reticle Photolithography Reticle

Parameter Information

ordinary precision

high precision

Material

Soda glass/quartz glass/customized

Quartz glass

Maximum External Dimensions

Thickness related/228.6*228.6mm

127*127mm

Minimum External Dimensions

1*1mm

2*2mm

Maximum Pattern Size

Thickness related

218.6*218.6/280*280mm

121*121mm

Flatness

Size related/conventional 10 μ m

Size related

Density Value

Yellow chromium and bright chromium are generally ≥ 3.0/maximum ≥ 6.0; 

Blue chromium ≥ 5.0

/

Thickness (Customizable)

0.2/0.33/0.5/0.7/1/1.1/1.5/1.6/2/2.3/3mm

2.3mm

Position Accuracy

Conventional 2 μ m/maximum 1 μ m

0.5μm

Line Width Accuracy

Conventional 0.2 μ m/maximum 0.1 μ m

0.05μm

Minimum Line Width

Conventional 2 μ m/maximum 1 μ m

0.5μm

Minimum Diameter

Conventional 2 μ m/maximum 1 μ m

0.5μm