Customized Thermal Vacuum Evaporator For Optic Thin Film Production

1. Product Description:

The Optical Coating Systems manufactured by Guotai are designed to maximize coating uniformity and production throughput, and have supported to a wide range of coating applications to include anti-reflection and highly reflective coatings, edge filters, beam splitters, optical filters, laser diodes, polarizers, gain flattening filters, and other complex non-quarter wave design including low stress and high laser damage threshold coatings.

2. Main Features:

• Flexible Configuration

The system can be carefully tailored to support client’s specific coating application and production requirements. Chamber sizes ranges from 400mm to 2700mm, which can be used as laboratory or mass production equipment. Configuration options include Thermal Evaporation, Electron Beam Evaporation, and Electron Beam Evaporation with Ion Assist; Substrate fixturing is available in single rotation, planetary, calotte, flip planetary, and unique arrangement for specific requirements; Support front side heating or back side heating, or both.

• Excellent Performance and Reliability

Guotai recognizes that user-friendliness and reliability of optical coating equipment is paramount to client’s success. The system incorporates proven design features based on decades of experience that produce exceptional results with easy to use software and dependable run to run consistency. We strive to continuously obtain customer feedback from coating engineers, operators, and maintenance personnel to improve design features that will minimize system downtime and increase overall productivity. Subsystem equipment of our systems are from reliable and brand manufacturers such as Baosi, Edwards, Inficon, Burkert, Omron to name a few. This allows our clients to benefit from the depths of Guotai and its vendors for the availability of service and spare parts.

• Coating Process Capability and Support

The system includes optional process development, system calibration, film characterization and uniformity adjustment to less than 0.5%. They can be delivered with multiple, fully developed, production-ready coating processes, pre-programmed to minimize system downtime between production changeover's and to maximize run efficiencies and product yields. Calibration of the process is so consistent that new designs may be supplier to the operator from a remote site with the results from a test run analyzed and a small adjustment in calibration made before final production. Designed for run-to-run repeatability and to deliver excellent results after a minimum number of test coatings, the system lends itself to a fully automatic operation reducing time, manpower, and costs-even with high layer counts and complex layer stacks.

3. Model & Specifications:

4. About Us

Guotai is an ISO 9001& ISO14001 certified manufacturer of high-performance optical filters and thin-film coating systems. Registered in 2013, Guotai has rapidly grown from a small startup to a China-based leader in precision optical thin film systems. Guotai's engineering team has been instrumental in achieving this growth by refining our advanced E-Beam deposition process, designing and building our coating equipment, and dedicating a large amount of resources to research and development of optical coating process. By so far, Guotai has obtained more than 30 patents regarding the coating systems and a few of national and regional prizes.

Guotai Provides:
Design & Development & Manufacture : Vacuum Coating Machine / Mechanical Parts / Electrical Parts / Coating Process
Services: Equipment Installation / Maintenance / Repair / Technical Support / Thin Film Production

[What are the pollution sources of the vacuum coating machine]

The vacuum coating machine is composed of many precision parts, these parts are produced through many mechanical processing processes, such as welding, grinding, turning, planing, boring, milling and other processes. Because of these tasks, the surface of equipment parts will inevitably be contaminated with grease, grease, metal shavings, solder, polishing paste, sweat marks and other contaminants caused by processing. These pollutants are volatile under vacuum conditions, which will affect the ultimate vacuum of the equipment.
In addition, the vacuum pollutants caused by these mechanical processes adsorb da gas in the atmospheric pressure environment, and in the vacuum state, these originally adsorbed gas will be released again, becoming a major limitation of the ultimate vacuum of the vacuum system. factor.
1. Evaporation of the filament of the vacuum gauge tube under high temperature conditions will cause a thin film to form on the ceramic insulator, which will damage its insulation strength and affect the accuracy of its measurement to a certain extent;
2. Due to high temperature evaporation, a metal film will be formed on the surface near the filament of the electron gun in the vacuum;
3. Due to the sputtering of the workpiece, the inner wall of the ion beam etching equipment will be contaminated by the spatter;
4. The inner wall of the vacuum evaporation coating equipment will be contaminated by its evaporation target material;
5. The vacuum drying system is often used, which will be contaminated by evaporated substances;
6. Diffusion pump oil and mechanical pump oil in vacuum coating equipment are a major source of pollution. After long-term operation of the coating machine, an oil film may form inside the equipment.