Quartz Crystal Vacuum Thermal Evaporation Optical Coating Machine
Thermal Evaporator Manufacturer Support Customzed Feactures For Optical Coatings
1. Product Description:
The Optical Coating Systems manufactured by Guotai are designed to maximize coating uniformity and production throughput, and have supported to a wide range of coating applications to include anti-reflection and highly reflective coatings, edge filters, beam splitters, optical filters, laser diodes, polarizers, gain flattening filters, and other complex non-quarter wave design including low stress and high laser damage threshold coatings.
2. Main Features:
- Flexible Configuration
The system can be carefully tailored to support client’s specific coating application and production requirements. Chamber sizes ranges from 400mm to 2700mm, which can be used as laboratory or mass production equipment. Configuration options include Thermal Evaporation, Electron Beam Evaporation, and Electron Beam Evaporation with Ion Assist; Substrate fixturing is available in single rotation, planetary, calotte, flip planetary, and unique arrangement for specific requirements; Support front side heating or back side heating, or both.
- Excellent Performance and Reliability
Guotai recognizes that user-friendliness and reliability of optical coating equipment is paramount to client’s success. The system incorporates proven design features based on decades of experience that produce exceptional results with easy to use software and dependable run to run consistency. We strive to continuously obtain customer feedback from coating engineers, operators, and maintenance personnel to improve design features that will minimize system downtime and increase overall productivity. Subsystem equipment of our systems are from reliable and brand manufacturers such as Baosi, Edwards, Inficon, Burkert, Omron to name a few. This allows our clients to benefit from the depths of Guotai and its vendors for the availability of service and spare parts.
- Coating Process Capability and Support
The system includes optional process development, system calibration, film characterization and uniformity adjustment to less than 0.5%. They can be delivered with multiple, fully developed, production-ready coating processes, pre-programmed to minimize system downtime between production changeover's and to maximize run efficiencies and product yields. Calibration of the process is so consistent that new designs may be supplier to the operator from a remote site with the results from a test run analyzed and a small adjustment in calibration made before final production. Designed for run-to-run repeatability and to deliver excellent results after a minimum number of test coatings, the system lends itself to a fully automatic operation reducing time, manpower, and costs-even with high layer counts and complex layer stacks.
3. Model & Specifications:
| Items | Specifications | |||||||
| Model | ZZS-600 | ZZS-800 | ZZS-920 | ZZS-1100 | ZZS-1300 | ZZS-1550 | ZZS-2250 | ZZS-2700 |
| Size (mm) | Φ600xH750 | Φ800xH900 | Φ920xH1000 | Φ1100xH1300 | Φ1300xH1500 | Φ1550xH1600 | Φ2250xH1700 | Φ2700xH1850 |
| Structure | Vertical Chamber with Single Door, SUS304 Stainless Steel, Water Cooled | |||||||
| Wavelength Applied | 200nm~25000nm | |||||||
| Rotating Speed | 0~30 RPM (Adjustable) | |||||||
| Pumping Speed | Atmospheric Pressure to 1.5x10-3Pa, ≤20min | |||||||
| Ultimate Vacuum | 9.0x10-5Pa | |||||||
| Coating Material | H4, Ge, Au, Ag, Cu, Al, SiO, Ta2O5, TiO2, Ti3O5, ZrO2, ZnS, Al2O3, Nb2O5, SiO2, MgF2, YbF3, ZnZs, ZnSe | |||||||
| Substrate Fixturing | Single or Split Rotating Dome, Planetary, Calotte, Flip Planetary or unique arrangment for special requirement | |||||||
| Substrate Heating | Back Side or Front Side Heating, can achieve 350℃ Max. | |||||||
| Exhausting Unit | Rough Vacuum Pump + High Vacuum Pump + Polycold (up to the coating requirement) | |||||||
| Vacuum Controller | Vacuum Controller, Penning Gauge, Pirani Gauge | |||||||
| Deposition Sources | Thermal Evaporation, Electron Beam Evaporation, Electron Bean Evaporation with Ion Assist. (up to the coating requirement) | |||||||
| Air Charging Unit | MFC or APC | |||||||
| Thickness Controller | Quartz Crystal Controller | |||||||
| Control System | Automatic and Manual | |||||||
| Application | AR, UV/IR Cut Filter, AF, Enhanced Relfection Coating, Band Pass Filter, RGB Filter, Photocatalst, HR Coating, etc. | |||||||
| Remarks: 1.Final configuration subject to customer's requirement. 2.Customized features are supported. |
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4. About Us
Guotai is an ISO 9001& ISO14001 certified manufacturer of high-performance optical filters and thin-film coating systems. Registered in 2013, Guotai has rapidly grown from a small startup to a China-based leader in precision optical thin film systems. Guotai's engineering team has been instrumental in achieving this growth by refining our advanced E-Beam deposition process, designing and building our coating equipment, and dedicating a large amount of resources to research and development of optical coating process. By so far, Guotai has obtained more than 30 patents regarding the coating systems and a few of national and regional prizes.
Guotai Provides:
Design & Development & Manufacture : Vacuum Coating Machine / Mechanical Parts / Electrical Parts / Coating Process
Services: Equipment Installation / Maintenance / Repair / Technical Support / Thin Film Production
Vacuum coating machine maintenance is a long-term and continuous task. Whether the machine maintenance is in place is directly related to the quality of the later coating. Many coatings have bad phenomena, and most of them are machine maintenance problems. Caused. Therefore, attention must be paid to machine maintenance. The following Huicheng Vacuum Editor will give you a detailed introduction to how to maintain the evaporation vacuum coating machine.
1. Regular inspection must be done: every device has its own life. Therefore, every time the machine is used for a period of time, a comprehensive inspection must be carried out.
Where there may be failures in the coating in the later stage, carry out timely investigation and treatment, such as the service life of the oil diffusion pump for 2 years, replace it in advance, and do not
Wait until the failure occurs before replacing it.
2. Do not disassemble blindly: The vacuum parts of the evaporation vacuum coating machine cannot be easily disassembled blindly. It is the most difficult part of the entire vacuum coating machine.
Part of it is generally not a professional engineer in the vacuum coating machine industry, who is not very familiar with the vacuum environment. There will be a problem in the process of disassembly and installation.
These details have caused the vacuum environment to be destroyed.
3. It may be that a vacuum chamber is too dirty with air; the coating machine is leaking water; 4 vacuum chambers;
4. When a bad sign is found during the maintenance of the equipment, solve it immediately and try not to delay. For example, some clamping workpiece turrets for bearings
, Replace the bearing, and then wait until it is completely broken, but it is really a big problem, the coating machine may cause the turret motor to burn and so on.
5. Develop good hygiene habits. Evaporative vacuum coating machine is relatively large for long-term dust. Dust will generate static electricity and damage electronic components
. Oil can quench the cracks of the conduit, causing some unexpected problems. We use vacuum equipment, vacuum equipment and its own peculiarities. true
Empty equipment, pay attention to cleanliness is a vacuum, the vacuum is poor, and deflation is even worse.
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