Quartz Crystal Metalizing Vacuum Coating Machine Oxides Metal Fluorides
Guotai Vacuum Metalizing Machine With Customized Features For Sale
1. Product Description:
The Optical Coating Systems manufactured by Guotai are designed to maximize coating uniformity and production throughput, and have supported to a wide range of coating applications to include anti-reflection and highly reflective coatings, edge filters, beam splitters, optical filters, laser diodes, polarizers, gain flattening filters, and other complex non-quarter wave design including low stress and high laser damage threshold coatings.
2. Main Features:
- Flexible Configuration
The system can be carefully tailored to support client’s specific coating application and production requirements. Chamber sizes ranges from 400mm to 2700mm, which can be used as laboratory or mass production equipment. Configuration options include Thermal Evaporation, Electron Beam Evaporation, and Electron Beam Evaporation with Ion Assist; Substrate fixturing is available in single rotation, planetary, calotte, flip planetary, and unique arrangement for specific requirements; Support front side heating or back side heating, or both.
- Excellent Performance and Reliability
Guotai recognizes that user-friendliness and reliability of optical coating equipment is paramount to client’s success. The system incorporates proven design features based on decades of experience that produce exceptional results with easy to use software and dependable run to run consistency. We strive to continuously obtain customer feedback from coating engineers, operators, and maintenance personnel to improve design features that will minimize system downtime and increase overall productivity. Subsystem equipment of our systems are from reliable and brand manufacturers such as Baosi, Edwards, Inficon, Burkert, Omron to name a few. This allows our clients to benefit from the depths of Guotai and its vendors for the availability of service and spare parts.
- Coating Process Capability and Support
The system includes optional process development, system calibration, film characterization and uniformity adjustment to less than 0.5%. They can be delivered with multiple, fully developed, production-ready coating processes, pre-programmed to minimize system downtime between production changeover's and to maximize run efficiencies and product yields. Calibration of the process is so consistent that new designs may be supplier to the operator from a remote site with the results from a test run analyzed and a small adjustment in calibration made before final production. Designed for run-to-run repeatability and to deliver excellent results after a minimum number of test coatings, the system lends itself to a fully automatic operation reducing time, manpower, and costs-even with high layer counts and complex layer stacks.
3. Model & Specifications:
| Items | Specifications | |||||||
| Model | ZZS-600 | ZZS-800 | ZZS-920 | ZZS-1100 | ZZS-1300 | ZZS-1550 | ZZS-2250 | ZZS-2700 |
| Size (mm) | Φ600xH750 | Φ800xH900 | Φ920xH1000 | Φ1100xH1300 | Φ1300xH1500 | Φ1550xH1600 | Φ2250xH1700 | Φ2700xH1850 |
| Structure | Vertical Chamber with Single Door, SUS304 Stainless Steel, Water Cooled | |||||||
| Wavelength Applied | 200nm~25000nm | |||||||
| Rotating Speed | 0~30 RPM (Adjustable) | |||||||
| Pumping Speed | Atmospheric Pressure to 1.5x10-3Pa, ≤20min | |||||||
| Ultimate Vacuum | 9.0x10-5Pa | |||||||
| Coating Material | H4, Ge, Au, Ag, Cu, Al, SiO, Ta2O5, TiO2, Ti3O5, ZrO2, ZnS, Al2O3, Nb2O5, SiO2, MgF2, YbF3, ZnZs, ZnSe | |||||||
| Substrate Fixturing | Single or Split Rotating Dome, Planetary, Calotte, Flip Planetary or unique arrangment for special requirement | |||||||
| Substrate Heating | Back Side or Front Side Heating, can achieve 350℃ Max. | |||||||
| Exhausting Unit | Rough Vacuum Pump + High Vacuum Pump + Polycold (up to the coating requirement) | |||||||
| Vacuum Controller | Vacuum Controller, Penning Gauge, Pirani Gauge | |||||||
| Deposition Sources | Thermal Evaporation, Electron Beam Evaporation, Electron Bean Evaporation with Ion Assist. (up to the coating requirement) | |||||||
| Air Charging Unit | MFC or APC | |||||||
| Thickness Controller | Quartz Crystal Controller | |||||||
| Control System | Automatic and Manual | |||||||
| Application | AR, UV/IR Cut Filter, AF, Enhanced Relfection Coating, Decorative Coating, Band Pass Filter, RGB Filter, Photocatalst, HR Coating, etc. | |||||||
| Remarks: 1.Final configuration subject to customer's requirement. 2.Customized features are supported. |
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4. About Us
Guotai is an ISO 9001& ISO14001 certified manufacturer of high-performance optical filters and thin-film coating systems. Registered in 2013, Guotai has rapidly grown from a small startup to a China-based leader in precision optical thin film systems. Guotai's engineering team has been instrumental in achieving this growth by refining our advanced E-Beam deposition process, designing and building our coating equipment, and dedicating a large amount of resources to research and development of optical coating process. By so far, Guotai has obtained more than 30 patents regarding the coating systems and a few of national and regional prizes.
Guotai Provides:
Design & Development & Manufacture : Vacuum Coating Machine / Mechanical Parts / Electrical Parts / Coating Process
Services: Equipment Installation / Maintenance / Repair / Technical Support / Thin Film Production
The processing methods of vacuum coating equipment of different processes are different. Inadvertent small faults may affect the normal operation of the entire machine and equipment. When problems are encountered, they need to be investigated one by one. Having experienced masters can often solve many problems. Speaking of the uniformity of the coating, this is one of the criteria for evaluating the quality of a vacuum coating machine. In the process of machine coating, processing the uneven coating of vacuum coating equipment, it is necessary to investigate the problems that may affect the uniformity of the coating, and the inspection and repair are completed before mass production. The coating of all coating equipment will be affected by some conditions that affect the uniformity of the coating. Take the magnetron sputtering vacuum coating equipment as a brief example:
The work of magnetron sputtering coating is originally not complicated. By equipping an efficient and stable sputtering source to bombard the target under a certain vacuum environment in the coating chamber, the target is decomposed. This is a PVD physical process. The decomposed target Atoms are deposited through the process to form a film on the surface of the product. In the reaction process, the influence of the uniformity of the magnetic field, the pressure holding of the vacuum environment, and the protective gas on the uniformity of the film should be considered. However, some uneven changes in the film layer may also be caused by the instability of the sputtering source or the target material. This type of situation is more difficult to deal with.
It should be understood that regardless of the accuracy of the monitor that comes with the coating equipment, it can only control the thickness of the film at a single point in the coating room. Generally, it refers to the middle position of the product. By controlling the uniformity of the film at this base point to ensure that the product is far away from this base point. Uniformity of the film.
The vacuum environment is controlled by pumping. To maintain a stable vacuum at all times requires an accurate detection and control system. When the vacuum reaches the required state, the pumping needs to be stopped, and the vacuum will be lower than the required state to be pumped in time. Voltage stabilization. The coating vacuum degree has a reasonable interval range. The smaller the difference in this range, the greater the accuracy required, the more difficult the control, and the better and more stable relative voltage stabilization; the greater the interval range, the lower the accuracy, and the requirements for the detection and control system are also Lower, the relative pressure fluctuation is greater, and the greater the impact on the uniformity of the film.
In the past few years, more and more customers have higher and higher requirements for vacuum coating equipment, especially in terms of film density and uniformity quality. For manufacturers of coating machines, they have improved their own process technology. It is the guarantee of competitiveness.
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