Features & Benefits
Ultrapure In-Line PVDF/PFA Fluid Heaters
PVDF/PFA ultrapure in-line fluid heaters are ideal for heating deionized water, acids, and less aggressive process chemistries use in high-purity processes of semiconductor, solar, MEMS manufacturing, and other industries using high-purity fluids. These heaters are designed for recirculation and point-of-use fluid heating applications. Their small footprints allow them to easily integrate into current systems. Available in 3-18 kW and various voltages.
Applications
Semiconductor Wet Processes
Sterilization/Cleaning
Solar/Photovoltaic Wafer Cleaning
Ultrapure design with PVDF/PFA wetted surfaces
Fast response with low watt density
No nitrogen purge required, reducing operating costs
Compact design of 10-30-in. heights, 4-6-in. diameters
Flexible designs with many options, safety features, voltages, and power outputs
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Heater
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Patented PreciseHeater® coil
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Wetted Surfaces
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PVDF/PFA
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Sizes
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3 kW to 18 kW (dependent on customer voltage)
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Voltages
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200 VAC to 600 VAC, 1-ph and 3-ph (dependent on wattage)
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Temperature
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Ambient to 95º C (203º F)
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Temperature Accuracy
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± 0.1º C
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Flow
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0.5 GPM (1.9 LPM) to 32 GPM (122 LPM) (dependent on model)
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Pressure
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60 PSIG @ 95º C
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Thermal cutoff
Thermocouples
Fiber-optic liquid level sensor
RTD sensors
Pressure relief valve
Liquid level sensor
Ground wire options
Over-temperature thermocouple
Process thermocouple
Have questions about our products or want to discuss a custom order? Our team is ready to help you.