110m3/H Ultrapure Water Treatment Plant For Silicon Wafer Cleaning With Edi Module
Enhance Filtration Efficiency 110m³/h ultrapure Water treatment plant for Silicon Wafer Cleaning with edi module
I. Overview
Ultra-pure water is a core component in silicon wafer cleaning for achieving efficient, low-defect photovoltaic cell production. Its application directly determines the cleanliness of the silicon wafer surface, minority carrier lifetime, and ultimately, cell efficiency.
Industry rule of thumb: For every 10-fold increase in the purity of ultra-pure water used in silicon wafer cleaning, cell efficiency gains of up to 0.15% can be achieved—“Photovoltaic competitiveness begins with the first drop of ultra-pure water.”
II. Process
Wafer Loading → SC1 Cleaning → Ultrapure Water Rinsing → HF Acid Cleaning → Ultrapure Water Rinsing → SC2 Cleaning → Ultrapure Water Final Rinsing → Drying
III. Parameters
| Parameter | Standard Value | ||
| Resistivity | ≥18.18 MΩ·cm @ 25°C | ||
| TOC | <0.5 ppb | ||
| Na⁺/K⁺ | <0.1 ppt | ||
| Fe³⁺/Al³⁺ | <0.05 ppt | ||
| Cl⁻ | <0.1 ppb | ||
| Particles >0.05 μm | ≤1 particle/mL | ||
| Dissolved Oxygen | ≤2 ppb |
IV. Here is a guideline for you to get a proper quotation
Tell us the raw water/source of water(tap water, well water, or sea water, etc)
Provide water analysis report(TDS , conductivity, or resistivity, etc)
Required production capacity( 5m³/H, 50m³/H,or 500m³/H, etc)
What's the pure water used for( industrial,Food and Beverage,or agriculture, etc )
Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.