Surface Defect Detection Equipment

Surface Defect Detector in Integrated Circuit Chip Industry Applications For the process control and yield management of blank mask in the fields of integrated circuit chip manufacturing, we can help glass substrate and mask manufacturers to identify and monitor the mask defects, reduce the risk of yield and improve their independent ability of R&D for core technologies. Working Principle The defects on the mask surface can be automatically detected from three aspects: optics

Blank Mask Substrate Surface defect detector Applications For the process control and yield management of blank mask substrate manufacturing, we can help manufacturers to identify and monitor the mask defects, reduce the risk of yield and improve their independent ability of R&D for core technologies. Working Principle The defects on the blank mask surface can be detected automatically based on visual information acquisition, underlying logic algorithm and actual needs.

Glass Substrate Surface defect detector Applications For the process control and yield management of glass substrate manufacturing, we can help manufacturers to identify and monitor the mask defects, reduce the risk of yield and improve their independent ability of R&D for core technologies. Working Principle Using specific angle ring light, coaxial light source and running mechanism to collect and analyze the directional photography information, thus realizing automatica

Surface Defect Detector in Semiconductor Industry Applications For the process control and yield management of blank mask in the fields of semiconductor display manufacturing, we can help glass substrate, mask and panel manufacturers to identify and monitor the mask defects, reduce the risk of yield and improve their independent ability of R&D for core technologies. Working Principle Realize automatic testing of the defects on the mask surface by super-resolution microscopic

Display Panel Surface defect detector Applications For the process control and yield management of display panel manufacturing, we can help manufacturers to identify and monitor the mask defects, reduce the risk of yield and improve their independent ability of R&D for core technologies. Working Principle 4x telecentric lens, specific angle ring light and coaxial light source are selected as the visual approach to automatically locate the defect positions, so as to automatica