Al2O3 TiO2 Magnetron Sputtering Deposition System For Medical Treatment
Magnetron Sputtering Deposition in Medical Treatment Industry
Applications
| Applications | Specific Purpose | Material Type |
| Medical treatment | Biocompatible materials | Al2O3, TiO2 |
Working Principle
The basic principle of magnetron sputtering is that electrons collide with argon atoms in the process of flying to
the substrate under the action of electric field, the produced argon ions bombard target surface. After the energy
exchange, the atoms on the target surface escape from the original lattice and are transfered to the substrate
surface to form films.
Features
| Model | MSC-MT-X—X |
| Coating type | Various dielectric films such as metal film, metal oxide and AIN |
| Coating temperature range | Normal temperature to 500℃ |
| Coating vacuum chamber size | 700mm * 750mm * 700mm (Customizable) |
| Background vacuum | < 5×10-7mbar |
| Coating thickness | ≥ 10nm |
| Thickness control precision | ≤ ±3% |
| Maximum coating size | ≥ 100mm (Customizable) |
| Film thickness uniformity | ≤ ±0.5% |
| Substrate carrier | With planetary rotation mechanism |
| Target material | 4×4 inches (compatible with 4 inches and below) |
| Power supply | The power supplies such as DC, pulse, RF, IF and bias are optional |
| Process gas | Ar, N2, O2 |
| Note: Customized production available. | |
Coating Sample
Process Steps
→ Place the substrate for coating into the vacuum chamber;
→ Roughly vacuumize;
→ Turn on molecular pump, vacuumize at top speed, then turn on the revolution and rotation;
→ Heating the vacuum chamber until the temperature reaches the target;
→ Implement the constant temperature control;
→ Clean elements;
→ Revolve and back to the origin;
→ Coating film according to process requirements;
→ Lower temperature and stop the pump assembly after coating;
→ Stop working when the automatic operation is finished;
Our Advantages
We are manufacturer.
Mature process.
Reply within 24 working hours.
Our ISO Certification
Parts Of Our Patents
Parts Of Our Awards and Qualifications of R&D
Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.